Etching of GeSe2 chalcogenide glass and its pulsed laser deposited thin films in SF6, SF6/Ar and SF6/O2 plasmas
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2020
ISSN: 1361-6595
DOI: 10.1088/1361-6595/abb0d0